Generalized Geometric Processing to Handle Complex Structures in 3D Interconnect Capacitance Extraction

The basic principle is using multiple simple prisms (maybe overlapped with each other) to describe a complex structure and using efficient geometric computation algorithms to construct its surfaces.This method has been integrated into QBEM,a quasi-multiple medium accelerated BEM software for fast 3D parasitic capacitance extraction.Numerical results show the method is reliable and efficient.