Modified Voronoi Diagram Layout Partition Based Substrate Coupling Parameter Extraction Technique Using BEM

An efficient and accurate substrate coupling parameter extraction method for mixed signal IC is introduced.Boundary Element Method is used to compute substrate coupling resistance.Comparing to Finite Difference Method,the computing speed is improved more than one order,and the precision of the result is retained.Combined with layout partition based on modified Voronoi diagram,the scale of substrate RC network is far smaller than that reported in the literature4 where Voronoi diagram is used to partition the layout too.