Abstract: In UDSM era, the intensified influence of interconnection to chip performance and signal reliability sets new demands for the integrated approach of physical design and developing new EDA tools. An integrated solution based on the extensible physical design data markup language PhyD-XML is proposed. The data model is constructed according to the data flow in physical design process through object-oriented structure analysis. The structure of the language and integration architecture are presented in detail. Interface is accommodated to transfer data from the third party software, such as Verilog, Cadence.