Abstract: The principle and implementation of a frequency-dependent 2-D interconnect inductance and resistance extractor is presented.Reducing the number of unknowns and saving calculation time are obtained through locally refining partition of filaments in the substrate.The Gauss integral is used to handle the three kinds of singular integrals between two filaments with overlap.This extractor has good calculation accuracy.It can exactly reflect the change of frequency-dependent inductance and resistance.