Abstract: Based on the idea of Micro-EDM milling and the strategy of electrode wear compensation,a CAM system for machining3D micro-structures is presented.Part modeling and slicing planning are fulfilled with Pro/E.The data file generated from Pro/NC is postprocessed with OpenGL and Visual C++ 6.0 to generate the Micro-EDM controlling codes and realize the dynamic simulation of electrode path.Experiments with a micro-EDM numeric control machining equipment verified the feasibility of this approach.