Abstract: Based on the mixed boundary element method,this paper proposes several techniques for 3D impedance extraction,including an efficient organization and row-column adjustment of the sparse coefficient matrix,and a pre-conditioned iterative equation solver. A fast impedance extractor is formed with these techniques.The proposed method has faster speed than the newly-developed FastImp by MIT,while preserving high accuracy.Numerical experiments on two typical interconnect structures verify the efficiency of this method.