集成电路矩形互连线二维电容及随频率变化电感的联合计算方法
Calculating 2-D Capacitance and Frequency-Dependent Inductance of Rectangular Interconnections in IC by Combined Methods
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摘要: 提出一种电容电感联合算法,可计算全频率范围内随频率变化的电感,同时得到电容矩阵.该算法利用电路模型法得到低频下若干频率的电感值;利用边界元法得到电容矩阵,并对电容矩阵求逆得到电流完全分布在导体表面时的电感值,由集肤深度得到该电感值对应的频率.对上述离散频率的电感值利用三次样条函数插值,得到整个频率范围内电感的变化曲线.算法避免了求解Helmholtz方程,极大地简化了算法.数值结果表明,该算法是可行的.Abstract: This paper describes combined methods to calculate the frequency-dependent inductances, which combine cross-section coupled circuit method with boundary element method (BEM) solving just Laplace's equation. It can calculate the inductance in the whole frequency range, and at the same time the capacitance matrix can be obtained. The coupled circuit method is used to calculate inductances in low frequency range; The BEM builds the capacitance matrix, then we invert this matrix, obtain inductance relating to the high frequency at which the current only distributes on the surfaces of conductor. A cubic spline interpolation between inductances at low and high frequency gives a good result over the entire frequency range. It avoids solving Helmholtz's equation, greatly reducing the total calculation. Numerical tests show it is applicable.
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