复杂3D寄生电容器的虚拟多介质切割

Virtual-Cutting Method for Parasitic Capacitors with Complex 3D Structures

摘要: 虚拟多介质是一种基于直接边界元的寄生电容快速提取方法.介绍复杂互连寄生电容器的结构及对其实现虚拟多介质切割的方法.实际算例表明,该算法可靠,并有较高效率.

Abstract: The quasi-multiple medium （QMM）,based on the direct boundary element method,is a fast algorithm for parasitic capacitance extraction.In this paper,the complex 3D structures of VLSI interconnect capacitors and the virtual cutting method for them are presented.The numerical results show that the virtual cutting method is reliable and efficient.