Abstract: In the computations of 3D VLSI parasitic interconnect capacitance,it is very difficult to partition the boundary elements on a multi-hole surface.A new boundary element mesh generation approach applied in 3D interconnect parasitic capacitance computation is presented.It can handle non-orthogonal geometric boundary efficiently,and generate regular trapezoid boundary elements.Compared with the global sweepline method,it has higher mesh generation speed and higher computation speed and accuracy.